Plasma Technology Plasma Activate 3200
Machine ID: 80454
Low pressure Plasma etcher, for roll to roll casstettes, 40 KHz, 5000W, adjustable time, pressure and power. chamber inner sizes 1200 x 1200 x 2200mm WxHxD, machine outside measures 3200 x 2550 x 3300mm WxHxD, chamber volume 3168 Liter, gases O2,Ar,N2. Vacuum pumps Ebara EV-S200P and Sogevac SV300. Year 2018.
| Brand: Plasma Technology |
| Model: Plasma Activate 3200 |
| Year of Manufacturing: 2018 |