Description: Plasma etcher with Ruvac vacuum pump, inner dimensions: 800 x 1080 x 840 mm, capacity of 22 panels w. panel size: 457 x 610 mm, overall machine dimensions: 1240 x 1060 mm, controller unit dimensions: 600 x 800 mm, 380V - 3 Phase - 32 A. air pressure: 4-6 bar. Please find below a more detailed .pdf file.
Description: Plasma Etcher, 4 different type of gases have been used Hydrogen Oxygen Tetrafluor and Nitrogen, including Edwards Dry pump system vacuum pump IQ DP80, up to 6 panels, max. panel size: 450 x 630 mm, floor space: 3550 x 3550 mm, max. height: 2140 mm. serial no. 72203. Year 2003. Edwards Dry pump as NEW (Year 2015). Find a detailed description of the etcher in .pdf below.
Description: plasma etcher for max. 4 panels each 310 x 500 mm, chamber 152 ltr, temp. max 120 degr.C.,
dimensions 900 x 1100mm and vacuum pump dimensions 750 x 600 mm, Gases oxygen and nitrogen, touch screen monitor, Year 1993.